- HOME
- Products
- RF Systems
Products
RF Systems
TDK-Lambda now offers RF Generators and Impedance Matching Networks for use in thin film applications, such as Semiconductors and Industrial Coatings, as well as Atmospheric Plasma applications. Our Aurora and Helios series of products are available in a wide range of power and frequency combinations as well as options for AC Input type, serial or analog interface and an active or passive front panel.
Aurora Series
100W – 10kW
2MHz to 60 MHz
RF Generators
The Aurora series uses the latest LDMOS FET technology to reliably operate into the extreme dynamic loads found in semiconductor and plasma coatings applications. With a broad power and frequency range, the Aurora series allows the user to stay within a single platform for all your requirements. Available in a wide range of configurations (2, 13, 27, 40 and 60 MHz; 100 W to 10 kW) and equipped with industry leading components and sub-assemblies, Aurora RF generators maximize reliability and productivity.
Features
Frequency tuning
Pulsing
CEX Master/Slave
CEX Phase shifting
Active Front Panel
RF Power ramping
Benefits
Increase process control
Decreased down time
Easy integration and control
Helios Series
100W – 50kW
2MHz to 100 MHz
RF Matching Network
The Helios series is designed to operate into the extreme dynamic loads found in semiconductor and plasma coating applications. Custom and standard packaging, as well as wide tuning ranges and multiple input/output connectors create a broad product portfolio to meet the market demands. Industry leading high speed motors and best in class vacuum variable capacitors combines performance and reliability.
Features
Full Digital Control
Advanced Tuning Algorithms
Analog or Serial Interfaces
Benefits
Reliable RF performance
Fast Tuning
Interfaces with Aurora RF generators
