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In the world of semiconductors, precision isn’t optional, it’s everything. Every process demands power that’s not just reliable, but engineered for perfection.

Semiconductor fabrication equipment has to operate flawlessly, 24 hours a day, for maximum production yields.

Prevent line down situations for your equipment with TDK-Lambda's power solutions, engineered power for the world's most demanding technologies.

Whether you're designing next generation fab equipment like deposition and etch tools or high through-put test systems, our power solutions are built to support your innovation.

If you have any unique requirements, explore our Power+ program to learn how we can tailor solutions to your exact needs.

Let's build the future together!

Distributed Power Architecture

What is Distributed Power Architecture (DPA)?
A power system that uses AC-DC or DC-DC front-end power supplies to convert AC utility voltage into a DC bus voltage, which is then converted by the DC-DC converters to the point of load voltage.

Typical DPA consists of the following
•AC-DC front-end (bulk power) with a universal input to create a DC bus voltage
•DC-DC Stage - Combination of isolated converts, bus converters, non-isolated converters (POLs), VRMs or integrated/discrete semiconductor devices

What are the advantages of using a High-Voltage DPA?
•Higher efficiency compared to low voltage DPA, especially with higher power requirements
•High-Voltage DC Bus (385Vdc) is generated to lower the I2R losses in the transmission to the DC-DC converters
•Lowers the maximum current and reduces the wire size to save cost
•Eliminates power conversion stages
•Ideal when loads are located at a distance from each other

•TPF45000 Non-Isolated AC/DC Power Supply
•Up to 45kW output, 10 each 4,500 Watt modules
•Scalable output from 4,500 to 45,000 Watts
•Can drive many isolated DC/DC Converters

Multiple outputs using the
PH-A Isolated DC/DC Converters
from 50-1200 Watts, 3.3V - 48V outputs

Ultra-Low Ripple & Noise

Challenges

Sensitive analog and RF test systems require ultra-clean power to avoid signal distortion and measurement errors.

Our Solutions

Our power supplies feature advanced filtering and shielding techniques to achieve industry-leading low ripple and noise performance.

440 vs. 208VAC Input

Challenges

High power applications require three-phase Delta or Wye configurations at voltages of 400, 440 and 480VAC. Typically, a large and expensive step-down transformer is used to provide a lower input line voltage (208/240VAC) to a traditional power supply.

Our Solutions

We offers products that operate on 3-phase, higher voltage inputs, reducing cost by eliminating the need for a step-down transformer.

SEMI F47 Line Dips

Challenges

SEMI F47 is the standard used by the semiconductor fabrication industry. It dictates the performance of a power supply during AC line outages caused by lightning. This avoids equipment shutting down during time-critical wafer fabrication resulting in the loss of work in progress.

Our Solutions

The vast majority of our products are designed to perform continuously during AC line dips and disruptions.

Tight Voltage Regulation

Challenges

Fabrication tools like ion implantation demand precise voltage control to maintain process integrity.

Our Solutions

High-speed feedback loops and digital control ensure tight regulation, even under dynamic load conditions.

Fast Transient Response

Challenges

Test equipment often switches loads rapidly, requiring power supplies to respond without overshoot or undershoot.

Our Solutions

Optimized control algorithms and low ESR output stages deliver fast, stable response to load changes.

Scalability & Modularity

Challenges

Semiconductor test systems can be modular, requiring 3-5kW power blocks that can be scaled up in power as the system requires.

Our Solutions

Our solutions are designed for parallel operation with 3 to 7.5kW power blocks that can be scaled up to 100kW.

Why TDK-Lambda?

Explore our suggested solutions for Semiconductor equipment

TPF Series - 4500W to 45,000W - Single Output AC-DC

  • ♦ Modular supply with 10 4,500W modules
  • ♦ 400/440/480 VAC (Nom.) 3Ph Delta or Wye
  • ♦ PMBus™ and USB Interfaces
  • ♦ 98% Efficiency
  • ♦ -20°C (start up) to +50°C operation
  • ♦ Less than 30kg Weight

PH-A Series - 50W to 1200W - Single Output DC-DC

  • ♦ Quarter, Half & Full Brick Sizes
  • ♦ 200-425 Vdc Input
  • ♦ 3.3, 5, 12, 24, 28, 48 Vdc Outputs
  • ♦ 3000 Vac Isolation
  • ♦ -40 to 100 °C Baseplate Temperature
  • ♦ IEC/EN62477-1 OVCIII (300-600W)
  • ♦ Parallel Operation (1200W)

TPS Series - 2040W to 4080W - Single Output AC-DC

  • ♦ 400/440/480 VAC (Nom.) 3Ph Delta or Wye
  • ♦ Fully Regulated, Wide Range Adj. Output
  • ♦ Voltage and Current Programming
  • ♦ -40°C (start up) to +70°C operation
  • ♦ Up to 92% Efficient
  • ♦ PMBus™ Communication
  • ♦ Built-in ORing FET for parallel operation

HWS-G Series - 3000W - Single Output AC-DC

  • ♦ 3000W programmable power supplies
  • ♦ Single or three phase inputs
  • ♦ 24, 48, 60, 130 Vdc Outputs
  • Serial or Analog Programming (CV/CC)
  • ♦ High Efficiency
  • ♦ IEC/EN62477-1 OVC III
  • ♦ Industrial

CUS350MP Series - 350W to 1000W - Single Output AC-DC

  • ♦ 350W (1000W Peak) Convection Cooled
  • ♦ 1000W Peak with Forced Air
  • ♦ Medical Certifications (2xMOPP)
  • ♦ Class B Conducted and Radiated EMI
  • ♦ 5V 0.3A standby voltage, Remote on/off
  • ♦ Compact size (88 x 183 x 44mm)
  • ♦ Five year warranty

CUS800M-1000M Series - 680W to 1000W - Single Output AC-DC

  • ♦ Low Cost
  • ♦ Variable speed low noise fan
  • ♦ Medical Certifications (2xMOPP)
  • ♦ Class B Conducted and Radiated EMI
  • ♦ Compact 3.3 x 6.7 x 1.67" size
  • ♦ <0.250mA Leakage Current

GENESYS+™ Rack DC Series - 30kW to 90kW - Single Output (Rack DC System) Programmable DC

  • ♦ DC Power Systems: 30kW, 45kW, 60kW and 90kW
  • ♦ VO(rated) up to 1500V; IO(rated) up to 4500A
  • ♦ CV, CC and CP Limit Operating Modes
  • ♦ Advanced Features Built-In
  • ♦ Built-In LAN, USB, RS-232/485 and Isolated 5V/10V
  • ♦ Optional IEEE, ECAT, Modbus-TCP, Isolated 4-20mA
  • ♦ Safety Agency Approvals / 5 Year Warranty

Genesys™ Series - 600W to 15,000W - Single Output Programmable DC

  • ♦ Pout(rated) from 750W (1U) to 15kW (3U)
  • ♦ VO(rated) up to 1.5kV; IO(rated) up to 1000A
  • ♦ Built-In Safety and Protection Features
  • ♦ Standard RS-232 / RS-485 / Remote Analog
  • ♦ Optional LAN (LXI 1.5), USB (2.0), IEEE (GPIB)
  • ♦ Optional Isolated 5/10V or 4-20mA Interfaces
  • ♦ Safety Agency Approvals / 5 Year Warranty

GENESYS+™ Series - 1000W to 15,600W - Single Output Programmable DC

  • ♦ Pout(rated) from 1kW (1U) to 15kW (3U)
  • ♦ VO(rated) up to 1500V; IO(rated) up to 1500A
  • ♦ Advanced Features Built-In
  • ♦ Scalable Power Systems up to 60kW
  • ♦ Built-In LAN, USB, RS-232/485 and Isolated 5V/10V
  • ♦ Optional IEEE, ECAT, Modbus-TCP, Isolated 4-20mA
  • ♦ Safety Agency Approvals / 5 Year Warranty

ZBM Series – Buffer Module (Accessory)

  • ♦ Provides 380ms Additional Hold-Up Time at Max Buffer Power
  • ♦ Utilizes Electrolytic Capacitors to Store Energy
  • ♦ Parallel Capable
  • ♦ Output Remote On/Off Function
  • ♦ 5 Year Warranty

HFE Series - 1584W to 2500W - Single Output AC-DC

  • ♦ 1U rackmount containing up to 5 units
  • ♦ Up to 29.2W/in³ power density
  • ♦ Internal ORing MOSFET & Current Share
  • ♦ High Efficiency
  • ♦ Up to 9,500W in 1U rack
  • ♦ PMBus™(I2C) and LAN options

RFE Series - 1000W to 2500W - Single Output AC-DC

  • ♦ 1U High
  • ♦ Internal ORing FETs and Current Share
  • ♦ High Efficiency
  • ♦ I2C, PMBus™ Communication option

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